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C&EN6d
Low-Temperature Conformal Atomic Layer Etching of Si with a Damage-Free Surface for Next-Generation Atomic-Scale Electronics | ACS Applied Nano Materials - ACS Publications
The Supporting Information is available free of charge on the ACS Publications website at DOI: 10.1021/acsanm.9b00944.. Si 2p XPS spectra of the samples after Al 2 O 3 deposition and BOE dip, ...