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IEEE1d
Ion Beam Deposition of Epitaxial 0001 In-Plane and Out-of-Plane Low-Resistivity Ruthenium for Interconnect Applications - IEEE Xplore
Ruthenium with favorable resistivity scaling effects is a promising candidate for nanometer scale interconnects. An anisotropic transport phenomenon results in a predicted orientation dependence for ...
Analytics Insight3d
Modeling the Heat: A Semiconductor Revolution Sparked by Supercritical Thinking
In a time when controlling thermal quantities governs the performance and yield of semiconductor devices, Sugirtha ...
IEEE3d
Effects of uncertainty in laser energy on temperature evolutions in directed energy deposition process using machine learning-based stochastic approach - IEEE Xplore
In this paper, the effects of uncertainty in laser energy on temperature evolutions in the directed energy deposition (DED) process of M4 High-Speed Steel are quantified using a machine-learning (ML) ...
C&EN6d
In Situ Infrared Characterization during Atomic Layer Deposition of Lanthanum Oxide | The Journal of Physical Chemistry C - ACS Publications
Mechanisms of atomic layer deposition (ALD) growth of lanthanum oxide on H-terminated Si(111) using lanthanum tris(N,N′-diisopropylacetamidinate) (La(iPr-MeAMD)3) are investigated using infrared (IR) ...