The elementary sensor, forming a subpixel, is a thermally isolated nanomachined CMOS transistor, dubbed TMOS, operating at subthreshold. The mosaic uncooled PIR sensors are composed of several TMOS ...

Abstract: Micromachined CMOS transistors, dubbed as “TMOS”, have been developed in recent years as a novel type of uncooled thermal sensors. The TMOS consists of a thermally isolated suspended ...