In a time when controlling thermal quantities governs the performance and yield of semiconductor devices, Sugirtha ...

This work demonstrates room temperature sensing of volatile organic compound (VOC) - acetone via an ultrathin film metal oxide sensing layer. Atomic layer deposition (ALD) enables a high quality ...

Lam Research Corp. (Nasdaq: LRCX) today unveiled ALTUS® Halo, the world's first atomic layer deposition (ALD) tool that harnesses the capabilities of the metal molybdenum in the production of ...

Abstract Highly porous poly (styrene-divinylbenzene) particles (∼85% porosity, 8−10 cm 3 /g pore volume, 43.5 m 2 /g surface area, 70 kg/m 3 particle density, and ∼600 μm diameter) were synthesized by ...

This technique achieves atomic layer control and conformal deposition through successive, self-limiting surface reactions. It involves introducing chemical reagents to the substrate surface ...

Atomic layer deposition (ALD) originated from atomic layer epitaxy, which was introduced in 1970 and initially used in electroluminescent displays. It rapidly revolutionized semiconducting ...

Kalkofen, et al., “Atomic layer deposition of phosphorus oxide films as solid sources for doping of semiconductor structures,” 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO), ...

Atomic layer deposition is a technology for depositing metals or metal oxides without defects even on complex three-dimensional structures with high aspect ratios. A further advantage of employing, ...

Jan 03, 2024 Advancing 2D MXene engineering with precious metals atomic layer deposition (Nanowerk News) A team of researchers, led by Professor Soo-Hyun Kim in the Graduate School of Semiconductors ...

By employing an innovative atomic layer deposition (ALD) process, Professor Seo successfully achieved regular arrangement of tellurium (Te) atoms at low temperatures as low as 50 degrees Celsius.

Atomic layer deposition (ALD) is a manufacturing method at the atomic and near-atomic scale. Since its invention in the 1970s, ALD has been industrially applied in fields such as displays, ...