ASML has announced the first customer installation of its HMI eScan 1100, the first multiple e-beam (multibeam) wafer inspection system for in-line yield enhancement applications, including ...

ASML’s introduced two new e-beam systems in 2022, the single beam eScan 430 and multibeam 1100. The e-beam market share lead comes after Applied Materials’ much ballyhoo “eBeam Technology ...